德國(guó)ERS是半導(dǎo)體制造行業(yè)熱管理解決方案的領(lǐng)導(dǎo)者，于1970年生產(chǎn)了第一套用于晶圓級(jí)測(cè)試的熱卡盤單元，自此一直引領(lǐng)行業(yè)。
其高低溫卡盤單元主要特點(diǎn)有：
1.出色的卡盤平整度
Maximum surface flatness ensures ideal contact area for the wafer. The extremely rigid ERS chucks are easily able to withstand the thermal and force stresses encountered in the use of high pin-count probe cards.
2.寬溫度控制范圍
ERS chuck systems are available for both extremely high and extremely low temperatures. For analytical probing applications, ERS also offers various temperature ranges between -65 °C to +400 °C.
3.快速的溫度爬升
For analytical and production test applications calling for fast temperature change, cooling and heating times become particularly important for wafer test throughput. ERS' know-how in heat-exchanger technology and air flow management are behind the fast ramping times.
4.高控溫精度，出色的溫度一致性（±0.03°C的溫度穩(wěn)定性；±0.1°C的熱均勻性）
Constant temperature distribution across the ERS chuck assures that the same base conditions apply to every chip on the wafer during test. ERS systems typically offer temperature uniformity of better than ± 0.5 °C across a 300 mm chuck.
5.超低的電氣噪聲，可應(yīng)用于fA級(jí)測(cè)試場(chǎng)景
Experience in test measurement technology provides ERS systems with the best electrical performance on its chucks. Additionally, the use of low-noise DC temperature controlling and electrically quiet air-cooling ensures that the systems are suitable for testing in the femto-Ampere range.
6.可靠性和超長(zhǎng)的使用壽命
Air-cooled systems from ERS have recorded MTBF values of more than 50,000 hours – almost six years uptime without interruption.
7.最小的空間要求
Thanks to the AC2 efficient heat exchanging technology, ERS chillers can provide chuck temperatures down to -65 °C at an impressively small footprint unmatched by other thermal wafer chuck systems.
The patented AC2 technology also allows for a high degree of integration into industry standard wafer probers, further shrinking the clean room footprint.
測(cè)芯科技CHIPTEST致力于國(guó)內(nèi)高端半導(dǎo)體測(cè)試設(shè)備的研發(fā)、生產(chǎn)和推廣，為用戶提供優(yōu)質(zhì)的產(chǎn)品和服務(wù)。在面對(duì)苛刻測(cè)試要求時(shí)，搭載ERS精密卡盤單元的探針臺(tái)系統(tǒng)，將能更好的幫助用戶準(zhǔn)確、可靠、高效的獲得測(cè)試數(shù)據(jù)，讓測(cè)試更有信心！助力國(guó)內(nèi)半導(dǎo)體行業(yè)的發(fā)展。
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